Influence of microstructure on the cutting behaviour of silicon

S Goel and A Kovalchenko and A Stukowski and G Cross, ACTA MATERIALIA, 105, 464-478 (2016).

DOI: 10.1016/j.actamat.2015.11.046

We use molecular dynamics simulation to study the mechanisms of plasticity during cutting of mono crystalline and polycrystalline silicon. Three scenarios are considered: (i) cutting a single crystal silicon workpiece with a single crystal diamond tool, (ii) cutting a polysilicon workpiece with a single crystal diamond tool, and (iii) cutting a single crystal silicon workpiece with a polycrystalline diamond tool. A long-range analytical bond order potential is used in the simulations, providing a more accurate picture of the atomic-scale mechanisms of brittle fracture, ductile plasticity, and structural changes in silicon. The MD simulation results show a unique phenomenon of brittle cracking typically inclined at an angle of 45 degrees-55 degrees to the cut surface, leading to the formation of periodic arrays of nanogrooves in mono crystalline silicon, which is a new insight into previously published results. Furthermore, during cutting, silicon is found to undergo solid-state directional amorphisation without prior Si-I to Si-II (beta tin) transformation, which is in direct contrast to many previously published MD studies on this topic. Our simulations also predict that the propensity for amorphisation is significantly higher in single crystal silicon than in polysilicon, signifying that grain boundaries eases the material removal process. Crown Copyright (C) 2015 Published by Elsevier Ltd on behalf of Acta Materialia Inc. All rights reserved.

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