Chemical sputtering of boronized and oxidized carbon surfaces irradiated by low-energy deuterium atoms

FJ Dominguez-Gutierrez and PS Krstic, JOURNAL OF APPLIED PHYSICS, 121, 215302 (2017).

DOI: 10.1063/1.4984756

We use molecular dynamics to study the chemical sputtering of boronized and oxidized amorphous carbon surfaces by deuterium irradiation in the range of impact energies of 5-30 eV. We report the sputtering yield as well as mass, energy, and angular spectra of ejected atoms and molecules of both virgin and deuterium saturated BCO surfaces and compare them with our data for a deuterated BC surface and existing theoretical and experimental results for amorphous C:D surfaces. Boron significantly suppresses the erosion of carbon, while the presence of oxygen results in further suppression. Published by AIP Publishing.

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