Micromechanism of oxygen transport during initial stage oxidation in Si(100) surface: A ReaxFF molecular dynamics simulation study

Y Sun and YL Liu and XF Chen and Z Zhai and F Xu and YJ Liu, APPLIED SURFACE SCIENCE, 406, 178-185 (2017).

DOI: 10.1016/j.apsusc.2017.01.302

The early stage oxidation in Si(100) surface has been investigated in this work by a reactive force field molecular dynamics (ReaxFF MD) simulation, manifesting that the oxygen transport acted as a dominant issue for initial oxidation process. Due to the oxidation, a compressive stress was generated in the oxide layer which blocked the oxygen transport perpendicular to the Si(100) surface and further prevented oxidation in the deeper layer. In contrast, thermal actuation was beneficial to the oxygen transport into deeper layer as temperature increases. Therefore, a competition mechanism was found for the oxygen transport during early stage oxidation in Si(100) surface. At room temperature, the oxygen transport was governed by the blocking effect of compressive stress, so a better quality oxide film with more uniform interface and more stoichiometric oxide structure was obtained. indeed, the mechanism presented in this work is also applicable for other self- limiting oxidation (e.g. metal oxidation) and is helpful for the design of high-performance electronic devices. (C) 2017 Elsevier B.V. All rights reserved.

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