Molecular dynamics study of the nanoimprint process on bi-crystal Al thin films with twin boundaries
YS He and T Sun and Y Yuan and JJ Zhang and YD Yan, MICROELECTRONIC ENGINEERING, 95, 116-120 (2012).
Molecular dynamics simulations were performed to elucidate the mechanisms of deformation in bi-crystal Al thin films with twin boundaries subjected to the nanoimprint process. The effects of stamp spacing on deformation behavior and the mechanical response of the imprinted material were examined. Simulation results indicated that dislocation activity and dislocation-TB interaction are two plastic deformation modes in bi-crystal Al thin films. The results demonstrated that the stamp spacing has significant influence on the dislocation-TB interaction during the nanoimprint process. (C) 2012 Elsevier B.V. All rights reserved.
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