Effects of temperature and strain rate on fracture properties of amorphous silicon nitride
NB Liao and X Tao and M Zhang and W Xue, JOURNAL OF MATERIALS SCIENCE- MATERIALS IN ELECTRONICS, 22, 1346-1349 (2011).
The high temperature mechanical behaviours of silicon nitride are difficult to be investigated because it is hard to measure these structural changes in the mechanical test. Atomistic simulation is a proper way to investigate the structural-mechanical mechanism at high temperatures. In this paper, the structural and fracture properties of amorphous silicon nitride (a-Si(3)N(4)) were studied at different temperatures. The simulation results consist with the experiments on radial distribution function, temperature-dependent yield stress and Young's modulus. Moreover, the effects of strain rate on mechanical properties were also studied, the results show a higher strain rate lead to larger yield stress and Young's modulus.
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